Categories: Automated Water Measurement System, Semiconductor, Semiconductor Advanced Metrology System (AMS Series), Wafer Roughness Measuring
The MP2100 is Chapman Instruments’ latest high-resolution proler. Specially designed for surface measurements and analysis, it can be used as both a production tool for inline quality inspection, as well as a research and development tool for establishing standards and researching tolerances. The MP2100 utilizes the same non-contact measurement technology as other Chapman prolers. Users can make either high-resolution linear or circular scans quickly. The powerful, yet user-friendly, Windows® based operational software can be programmed to execute a series of routines and report the data o‑-line for further analysis. Password security and event viewer/error logging are standard with Chapman software. Robotic handling for 150 mm, 200 mm and 300 mm wafers is available as an option.
Specifications
- Fast, complete circular scans (360° around wafer surface)
- Nomarski Viewing System for high definition visual inspection
- Scan lengths ranging from µm to complete circumferences (200 or 300 mm wafer)
- Roughness and waviness data from a single scan
- Non-contact 3D scans
- Automated sample positioning (X, Y, theta)
- Customized measurement sequences with multiple scans implemented with a single keystroke
- Automated focus acquisition
- Closed-loop auto-focus system allows focus to be maintained while scanning over samples with varying topography
- Optional robotic handling
