Versatility and high spatial resolution meet automation with the JSM-IT810 series FE-SEM.
No-coding automation for imaging and EDS analysis is built-in for a streamlined and efficient workflow. New functions are available to ensure high quality data and an enhanced user experience for all SEM users. Functions include the SEM automatic adjustment package, a trapezoidal correction function (useful for EBSD measurements) and Live 3D surface reconstruction for observation of surface topography. Operating a FE SEM has never been easier with the JSM-IT810 series.

Automatic Observation and Analysis Function “Neo Action”

SEM observation and EDS analysis can be automated by simply setting the analysis conditions and selecting the areas to measure.

SEM Automatic Adjustment Package

SEM Automatic Adjustment Package (Optional): This feature uses a dedicated sample to perform magnification calibration, beam alignment, and EDS energy calibration. Regular checks ensure the equipment remains in optimal condition.

Live-3D Function

Choose our multi-segmented, semiconductor type BSE detector to create a Live 3D reconstruction of the sample surface.
View the 3D image in real-time to check the sample topology.

EDS Integration

Next generation operability that eliminates the barriers between observation by SEM and elemental analysis by EDS. Various analysis methods such as point, area, MAP, and line can be directly reserved on the observation screen, allowing for the immediate start of an analysis.