• With maximum uniformity, superior gas and RF distribution, a proprietary controlling software and compliance to CE and SEMI international standards, our plasma cleaning and etching systems are ideal for all applications where process reliability and repeatability are a must.

Categories: Electrical & Electronics, Plasma Cleaning & Etching System, Production Equipment, SCI Plasma, Semiconductor.

Titan Batch Plasma System

Titan is a standalone batch plasma cleaning system specially designed to process 6 magazines per cycle.

Titan’s chamber configuration ensures uniform plasma distribution to guarantee effective cleaning and activation across all the substrates.

Product Features:

The features contained in this system allow reliable and repeatable cycling of the plasma process for 24/7 operation.